A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System
Hao, Cen1; Deng, Fuming2; Du, Quanbin3; Min, Zhiyu3; Lei, Qing2; Wang, Lei3; Zhang, Liang1
2024-10
发表期刊COATINGS
卷号14期号:10
摘要Hot-filament chemical vapor deposition (HFCVD) has become the most widely used ways of preparing diamond film-coated tools due to the simple equipment used, its convenient operation, and its low cost. In the production process of an actual factory, a large number of coated tools need to be prepared in batches. Factors such as the hot-filament arrangement often affect the uniformity of coating on tools, making the performance of the tools prepared in the same batch unstable. This article uses ANSYS R15.0 software software in the context of computational fluid dynamics (CFD) to calculate the temperature field in the HFCVD system, and study the effect of filament spacing on the uniformity of the temperature field of the surface of the substrate. It was found that when the distance between filaments was 14 mm, 10 mm, 10 mm, 8 mm, 8 mm, the temperature field on the surface of the substrate was the most uniform. The experiments are consistent with the results of the simulation, indicating that simulation research has practical significance.
关键词HFCVD uniformity temperature field
其他关键词PERFORMANCE
DOI10.3390/coatings14101266
收录类别SCIE
语种英语
WOS研究方向Materials Science ; Physics
WOS类目Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied
WOS记录号WOS:001343004800001
出版者MDPI
原始文献类型Article
EISSN2079-6412
引用统计
被引频次[WOS]:0   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.library.ouchn.edu.cn/handle/39V7QQFX/172540
专题国家开放大学江苏分部
通讯作者Du, Quanbin; Min, Zhiyu
作者单位1.Jiangsu Open Univ, Sch Informat Engn, Nanjing 210036, Peoples R China;
2.China Univ Min & Technol, Inst Superhard Cutting Tool Mat, Beijing 100083, Peoples R China;
3.Henan Mech & Elect Vocat Coll, Henan Key Lab Intelligent Mfg Equipment Integrat S, Zhengzhou 451191, Peoples R China
第一作者单位国家开放大学江苏分部
第一作者的第一单位国家开放大学江苏分部
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Hao, Cen,Deng, Fuming,Du, Quanbin,et al. A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System[J]. COATINGS,2024,14(10).
APA Hao, Cen.,Deng, Fuming.,Du, Quanbin.,Min, Zhiyu.,Lei, Qing.,...&Zhang, Liang.(2024).A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System.COATINGS,14(10).
MLA Hao, Cen,et al."A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System".COATINGS 14.10(2024).
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