A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System | |
Hao, Cen1; Deng, Fuming2; Du, Quanbin3; Min, Zhiyu3; Lei, Qing2; Wang, Lei3; Zhang, Liang1 | |
2024-10 | |
发表期刊 | COATINGS
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卷号 | 14期号:10 |
摘要 | Hot-filament chemical vapor deposition (HFCVD) has become the most widely used ways of preparing diamond film-coated tools due to the simple equipment used, its convenient operation, and its low cost. In the production process of an actual factory, a large number of coated tools need to be prepared in batches. Factors such as the hot-filament arrangement often affect the uniformity of coating on tools, making the performance of the tools prepared in the same batch unstable. This article uses ANSYS R15.0 software software in the context of computational fluid dynamics (CFD) to calculate the temperature field in the HFCVD system, and study the effect of filament spacing on the uniformity of the temperature field of the surface of the substrate. It was found that when the distance between filaments was 14 mm, 10 mm, 10 mm, 8 mm, 8 mm, the temperature field on the surface of the substrate was the most uniform. The experiments are consistent with the results of the simulation, indicating that simulation research has practical significance. |
关键词 | HFCVD uniformity temperature field |
其他关键词 | PERFORMANCE |
DOI | 10.3390/coatings14101266 |
收录类别 | SCIE |
语种 | 英语 |
WOS研究方向 | Materials Science ; Physics |
WOS类目 | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied |
WOS记录号 | WOS:001343004800001 |
出版者 | MDPI |
原始文献类型 | Article |
EISSN | 2079-6412 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.library.ouchn.edu.cn/handle/39V7QQFX/172540 |
专题 | 国家开放大学江苏分部 |
通讯作者 | Du, Quanbin; Min, Zhiyu |
作者单位 | 1.Jiangsu Open Univ, Sch Informat Engn, Nanjing 210036, Peoples R China; 2.China Univ Min & Technol, Inst Superhard Cutting Tool Mat, Beijing 100083, Peoples R China; 3.Henan Mech & Elect Vocat Coll, Henan Key Lab Intelligent Mfg Equipment Integrat S, Zhengzhou 451191, Peoples R China |
第一作者单位 | 国家开放大学江苏分部 |
第一作者的第一单位 | 国家开放大学江苏分部 |
推荐引用方式 GB/T 7714 | Hao, Cen,Deng, Fuming,Du, Quanbin,et al. A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System[J]. COATINGS,2024,14(10). |
APA | Hao, Cen.,Deng, Fuming.,Du, Quanbin.,Min, Zhiyu.,Lei, Qing.,...&Zhang, Liang.(2024).A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System.COATINGS,14(10). |
MLA | Hao, Cen,et al."A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System".COATINGS 14.10(2024). |
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